Micro-electro mechanical system (mems) structures and methods of forming the same

作者: Chia-Pao Shu , Chia-Ming Hung , Wen-Chuan Tai , Hsiang-Fu Chen , Hung-Sen Wang

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摘要: A device includes a first substrate bonded with second structure. The structure an outgasing prevention At least one micro-electro mechanical system (MEMS) is disposed over the

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