H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.

摘要: Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition can greatly reduce the size of spectrometer equipment, making portable spectrometers (FTS) possible. How to minimize tilting MEMS mirror plate during its large linear scan is a major problem in this application. In work, an FTS system has been constructed based on biaxial micromirror with large-piston displacement 180 μm, and H∞ robust controller designed. Compared open-loop control proportional-integral-derivative (PID) closed-loop control, good stability robustness. The experimental results show that stable scanning reaches 110.9 μm under angle full range falls within ±0.0014°. Without cannot generate meaningful spectra. contrast, yields clean spectrum width at half maximum (FWHM) linewidth 96 cm-1 control. Moreover, maintain robustness various driving conditions.