Gas enclosure systems and methods utilizing multi-zone circulation and filtration

摘要: The present teachings relate to various embodiments of a gas enclosure system that can have particle control include multi-zone circulation and filtration system, low-particle-generating X-axis linear bearing for moving printhead assembly relative substrate, service bundle housing exhaust system. Various components tunnel be in flow communication with bridge provide cross-flow about floatation table printing related apparatuses devices. Accordingly, as disclosed herein effectively remove both airborne particulate matter, well matter generated proximal substrate during process. As such, conjunction purification the controlled manufacturing environment resulting high-yield OLED