作者: S. Muruganand , N. Manikandan , B. Shanthi
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摘要: In this paper describes, construction and working of more efficient compactable spin coating machine with a low power consumption comparing to that current available in the market. The consists stepper motor, syringe system, Dc brushless motor Arm processor. will coat thin film micro level thickness its spinning speed flow rate liquid has been controlled by arm processor (LPC 11U24). Thickness is determined time machine. Films good uniformity for various thicknesses have successfully prepared using above machine, capacitor sensor fabricated techniques studied their physical properties