Resonator structure and a filter comprising such a resonator structure

作者: Juha Ellä , Markku Ylilammi , Jyrki Kaitila

DOI:

关键词:

摘要: A resonator structure (1200, 1300, 1400), where a certain wave mode is piezoelectrically excitable, comprises at least two conductor layers (110, 120) and one piezoelectric layer (110) in between the layers, said extending over first area of structure, which excitable structure. The characterized that it frame-like zone (2, 4) confining center (3) within area, cut-off frequency excited different from width acoustical properties are arranged so displacement relating to strongest resonance substantially uniform resonator.

参考文章(14)
Tuomas Pensala, Method of tuning BAW resonators ,(2002)
Edward Chan, Bradley Paul Barber, John Edward Graebner, Increased bandwidth thin film resonator having a columnar structure ,(2000)
Kouichi Hirama, Tomokazu Shouzi, Yoshiaki Tanaka, Piezoelectric resonators for overtone oscillations ,(1988)
K.M. Lakin, G.R. Kline, K.T. McCarron, Thin film bulk acoustic wave filters for GPS internaltional ultrasonics symposium. pp. 471- 476 ,(1992) , 10.1109/ULTSYM.1992.275963
K. M. Lakin, J. S. Wang, Acoustic bulk wave composite resonators Applied Physics Letters. ,vol. 38, pp. 125- 127 ,(1981) , 10.1063/1.92298
Lawrence N. Dworsky, Luke C. B. Mang, Thin film resonator having stacked acoustic reflecting impedance matching layers and method The Journal of the Acoustical Society of America. ,vol. 98, pp. 679- 680 ,(1995) , 10.1121/1.413640
Shiro Nakayama, Piezo-electric acceleration sensor Journal of the Acoustical Society of America. ,vol. 89, pp. 3023- 3023 ,(1988) , 10.1121/1.400761
Eun Sok Kim, R.S. Muller, IC-Processed piezoelectric microphone IEEE Electron Device Letters. ,vol. 8, pp. 467- 468 ,(1987) , 10.1109/EDL.1987.26696
M.J.S. Lowe, Matrix techniques for modeling ultrasonic waves in multilayered media IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 42, pp. 525- 542 ,(1995) , 10.1109/58.393096