Contact-less micro relay
作者： Hideaki Kitazawa , Seisuke Nigo , Seiichi Kato , Yoshio Uno
DOI:
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摘要: It is possible to eliminate necessity of a relay contact micro processing which has been one bottlenecks MEMS. A contact-less turns ON/OFF power from an output terminal by caused voltage change in input terminal. The element (1) formed insulating film (3) having vertical nano structure on conductive substrate (4) material and electrode (2) the surface (3).
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