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作者: Maik Wiemer , Dirk Wuensch , Joerg Braeuer , Thomas Gessner
DOI: 10.1002/9783527644223.CH6
关键词:
摘要:
Japanese Journal of Applied Physics,2015, 引用: 7
symposium on design, test, integration and packaging of mems/moems,2014, 引用: 2
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems,2015, 引用: 1
IEEE Journal of Selected Topics in Quantum Electronics,2014, 引用: 11
International Symposium on Microelectronics,2016, 引用: 1
Precision Engineering,2019, 引用: 4
Journal of Adhesion,2021, 引用: 1