Electrostatic levitation: an elegant method to control MEMS switching operation
作者： Shahrzad Towfighian , Mohammad Mousavi , Mohammad Alzgool
DOI: 10.1007/S11071-021-06499-9
关键词:
摘要: This paper investigates the characteristics of a micro-switch that uses two side electrodes to open normally closed switch. The surround fixed electrode in well-known gap-closing configuration. can switch and be tuned respond appropriately outside forces. combined system dramatically improves control standard In conventional switches, DC voltage above certain value closes To reopen switch, difference is reduced peel off moving electrode. Currently, contact area carefully designed avoid stiction, but degradation over time stiction forces cause permanent failure. this work, opening occurs by feeding beyond results levitation force. Even if surfaces happens, increasing voltages. actuation are thoroughly analyzed include static pull-in, displacement, release voltage, dynamic frequency response, basins attraction. validated experimental tests. levitation-based tunability as sensitivity switching thresholds adjusted.
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