Micro-and nano-fabrication of connected and disconnected metallic structures in three-dimensions using ultrafast laser pulses

作者: Seung Yeon Kang , Eric Mazur , Kevin L. Vora

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摘要: In one aspect, a method for fabricating metal structures in two or three dimensions is disclosed, which includes providing mixture of polymer, precursor and solvent, applying the to surface substrate. The applied can then be cured (e.g., via heat treatment) generate polymeric layer film) with ions associated distributed therein. Subsequently, radiation pulses) at wavelength substantially transparent focused onto least location so as cause chemical reduction within portion that location, thereby generating metalized region.

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