Stamp having an antisticking layer and a method of forming of repairing such a stamp
作者： Babak Heidari , Torbjörn Ling
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摘要: A stamp for use in transferring a pattern nano-scale has monomolecular antisticking layer. The anti-sticking layer comprises molecular chains, which are covalently bound to the surface of and each comprise at least one fluorine-containing group. Each chain contains group Q, bond is weaker than other bonds as well covalent that binds stamp. Splitting said Q creates Q1, attached part being left on capable reacting with compound restore In method manufacturing nanoscale, provided above-mentioned chain. repairing damaged stamp, treated reagent, coupling end, located end reagent.
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