ASSESSMENT OF EFFECTIVE-MEDIUM THEORIES OF ION-BEAM SPUTTERED Nb 2 O 5 -SiO 2 AND ZrO 2 -SiO 2 MIXTURES
作者： Tomas Tolenis , Mindaugas Gaspariūnas , Martynas Lelis , Artūras Plukis , Rytis Buzelis
DOI: 10.3952/PHYSICS.V54I2.2918
关键词:
摘要: Single-layer mixture coatings of ZrO 2 –SiO and Nb O 5 produced by the ion beam sputtering (IBS) deposition technique were investigated in detail. Effective medium approximation (EMA) models two non-optical methods, namely Rutherford backscattering spectroscopy (RBS) X-ray photoelectron (XPS) applied for characterization elemental composition these films. The comparison obtained results indicates discrepancies atomic material concentrations. reasons potential sources such are discussed qualitatively indicate limitations optical models.
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