Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing
作者： Victor TS Wong , Wen J Li , None
DOI: 10.1109/MEMSYS.2003.1189682
关键词:
摘要: Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes demonstrated potentially serve as novel temperature anemometry sensors. We have measured the coefficient of resistance (TCR) these MWNT bundles also integrated them into hot-film constant current configuration for dynamic characterization. It was discovered that resulting device could be operated in /spl mu/W range, which is three orders magnitude lower than conventional MEMS polysilicon based shear stress For example, achieve a overheat ratio 0.1, only 10 mu/A needed heat bundle compare mA range polysilicon-based Moreover, exhibited very fast frequency response (>100 kHz) mode, higher its reported counterparts this mode operation. Our processing technology scalable producing sensing ranging from 5 mu/m 15 length.
elsevier.com
sci-hub.se 参考文章(15)
Herbert A. Pohl, Dielectrophoresis: The Behavior of Neutral Matter in Nonuniform Electric Fields ,(1978)
Sander J. Tans, Alwin R. M. Verschueren, Cees Dekker, Room-temperature transistor based on a single carbon nanotube Nature. ,vol. 393, pp. 49- 52 ,(1998) , 10.1038/29954
Philip G Collins, Michael S Arnold, Phaedon Avouris, Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown Science. ,vol. 292, pp. 706- 709 ,(2001) , 10.1126/SCIENCE.1058782
Kunitoshi Yamamoto, Seiji Akita, Yoshikazu Nakayama, Orientation and purification of carbon nanotubes using ac electrophoresis Journal of Physics D. ,vol. 31, ,(1998) , 10.1088/0022-3727/31/8/002
Kunitoshi Yamamoto Kunitoshi Yamamoto, Seiji Akita Seiji Akita, Yoshikazu Nakayama Yoshikazu Nakayama, Orientation of Carbon Nanotubes Using Electrophoresis Japanese Journal of Applied Physics. ,vol. 35, ,(1996) , 10.1143/JJAP.35.L917
T. W. Ebbesen, H. J. Lezec, H. Hiura, J. W. Bennett, H. F. Ghaemi, T. Thio, Electrical conductivity of individual carbon nanotubes Nature. ,vol. 382, pp. 54- 56 ,(1996) , 10.1038/382054A0
Sumio Iijima, Helical microtubules of graphitic carbon Nature. ,vol. 354, pp. 56- 58 ,(1991) , 10.1038/354056A0
WB Choi, DS Chung, JH Kang, HY Kim, YW Jin, IT Han, YH Lee, JE Jung, NS Lee, GS Park, JM Kim, None, Fully sealed, high-brightness carbon-nanotube field-emission display Applied Physics Letters. ,vol. 75, pp. 3129- 3131 ,(1999) , 10.1063/1.125253
AC electrokinetics: applications for nanotechnology Nanotechnology. ,vol. 11, pp. 124- 132 ,(2000) , 10.1088/0957-4484/11/2/314
Eric W. Wong, Paul E. Sheehan, Charles M. Lieber, Nanobeam Mechanics: Elasticity, Strength, and Toughness of Nanorods and Nanotubes Science. ,vol. 277, pp. 1971- 1975 ,(1997) , 10.1126/SCIENCE.277.5334.1971