Investigation of mechanical properties of the generated surface structures on a chalcogenide thin film with AFM
作者： Judit Kaman , Attila Bonyar , Istvan Csarnovics , Csaba Cserhati
DOI: 10.1109/SIITME.2015.7342294
关键词:
摘要: Light induced holographic grating and electron beam stripes were created on Ge28Se72 chalcogenide thin film its local surface mechanical properties studied by AFM. The Young's moduli of the grating, reference area determined through force curves tip-sample energy dissipation was calculated from tapping mode point spectroscopy curves. Significant difference obtained between structures regarding modulus dissipation.
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