Loading unit and processing system
作者： Katsuya Toba
DOI:
关键词:
摘要: A loading unit which elevates a substrate holder holding plurality of substrates to be subjected heat treatment with respect cylindrical processing container whose bottom portion is opened and closed by cap, includes, housing, an elevator mechanism elevating the holder, shutter closing opening container, moving having elevatable arm, first partitioning box installed surround space elevated provided cooling gas injecting means, second connected mechanism, third shutter.
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