Wafer interleaving with electro-optical safety features

摘要: A pair of opposed teeth combs hold a first plurality waters at upper location. lift platform on machine engageably holds and lifts second into position to be interleaved the spaces wafer group. The are pivotably mounted such that skewed water in group wafers one comes contact with comb causes pivot slightly upwardly, or creates separation-diminishing force separated portions platform. Moveable suspensions floatably corners parts relative each other; these react away from an error-initiated contact. Transmitter/receiver units positioned optical alignment piece foreign matter any light beams broken so error corrective action is achieved.