Multiwalled Carbon Nanotubes by Chemical Vapor Deposition Using Multilayered Metal Catalysts

摘要: Multiwalled carbon nanotubes (MWCNTs) have been grown on various substrates by thermal chemical vapor deposition using multilayered metal catalysts. Ion beam sputtering is used to deposit layers sequentially. Underlayers of Al (2−20 nm) are shown influence the growth characteristics with Fe or Ni as active The as-sputtered catalyst surface, characterized atomic force and scanning tunneling microscopies, consists nanometer scale (<10 particles. High-resolution transmission electron microscopy Raman analysis characterize MWCNTs. Optimization two allows MWCNT towers patterned unpatterned substrates.