Effects of substrate temperatures on the structure and properties of hafnium dioxide films.
作者： Hongfei Jiao , Xinbin Cheng , Jiangtao Lu , Ganghua Bao , Yongli Liu
DOI: 10.1364/AO.50.00C309
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摘要: … hafnium using the reactive electron beam evaporation method. X-ray diffraction was applied to determine the crystalline phase of these films, the surface morphology of the samples …
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