Compact excimer laser

摘要: A compact excimer laser, including a housing structure having plurality of walls forming an internal laser cavity. gas is located within the cavity and with capable lasing action. pair spaced electrodes are form electrical discharge area between for stimulating to action in accordance electrodes. One along central position grounded structure. The other adjacent but from one electrode mounted on main insulator member. member formed ceramic material intermediate wall have floating relative compressively supported at extends outward this without any additional support respond bending forces constraint than support.