Badania eksperymentalne mikrofalowego generatora mikroplazmy małej mocy

作者: D. Czylkowski , B. Hrycak , M. Jasiński , J. Mizeraczyk

DOI:

关键词:

摘要:

参考文章(17)
J. Mizerczyk, Ł. Kroplewski, M. Dors, M. Jasiński, Z. Zakrzewski, Coaxial microplasma source Przegląd Elektrotechniczny. pp. 118- 121 ,(2009)
Jaeho Kim, Kazuo Terashima, 2.45 GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology Applied Physics Letters. ,vol. 86, pp. 191504- ,(2005) , 10.1063/1.1926411
A M Bilgic, U Engel, E Voges, M Kückelheim, J A C Broekaert, A new low-power microwave plasma source using microstrip technology for atomic emission spectrometry Plasma Sources Science and Technology. ,vol. 9, pp. 1- 4 ,(2000) , 10.1088/0963-0252/9/1/301
Kazuo Shimizu, Takeki Sugiyama, Manisha Nishamani, Masaki Kanamori, Application of Micro Plasma for NOx Removal ieee industry applications society annual meeting. ,vol. 45, pp. 1887- 1892 ,(2007) , 10.1109/07IAS.2007.288
J Choi, F Iza, H J Do, J K Lee, M H Cho, Microwave-excited atmospheric-pressure microplasmas based on a coaxial transmission line resonator Plasma Sources Science and Technology. ,vol. 18, pp. 025029- ,(2009) , 10.1088/0963-0252/18/2/025029
S. Kanazawa, R. Daidai, S. Akamine, T. Ohkubo, Generation of microplasma jet at atmospheric pressure using a modified waveguide-based plasma torch Surface & Coatings Technology. ,vol. 202, pp. 5275- 5279 ,(2008) , 10.1016/J.SURFCOAT.2008.06.005
Takanori Ichiki, Ryo Taura, Yasuhiro Horiike, Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets Journal of Applied Physics. ,vol. 95, pp. 35- 39 ,(2004) , 10.1063/1.1630375
Tomoyuki Kikuchi, Yasuhiro Hasegawa, Hajime Shirai, Rf microplasma jet at atmospheric pressure: characterization and application to thin film processing Journal of Physics D. ,vol. 37, pp. 1537- 1543 ,(2004) , 10.1088/0022-3727/37/11/005
N. M. Voropai, V. V. Shcherbak, A. A. Grigor'ev, Pulsed microplasma welding of thin aluminum gaskets Chemical and Petroleum Engineering. ,vol. 7, pp. 977- 978 ,(1971) , 10.1007/BF01147639