作者: Mark A. Unkrich , Graham M. Flower , William R. Trutna
DOI:
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摘要: A spread-spectrum radio, such as a frequency-hopping radio or direct-sequence includes transmitter that utilizes microelectromechanical systems (MEMS) based oscillation system to generate signal and/or receiver MEMS-based frequency selection receive signal. In an embodiment, the and utilize MEMS resonators thin film bulk acoustic (FBARs) are fabricated in high density on single substrate.