作者: Michael B. Sinclair , Antonio J. Ricco , Michael A. Butler , Stephen D. Senturia
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摘要: An electrically-programmable diffraction grating. The programmable grating includes a substrate having plurality of electrodes formed thereon and moveable element above each the electrodes. elements are electrostatically to form for diffracting an incident beam light as it is reflected from upper surfaces elements. grating, by micromachining process, has applications optical information processing (e.g. correlators computers), multiplexing demultiplexing beams different wavelengths fiber communications), forming spectrometers correlation scanning spectrometers).