Developer producing equipment and method
作者： Takahiro Hozan , Makoto Kikukawa , Shu Ogawa , Toshimoto Nakagawa , Satoru Morita
DOI:
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摘要: The developer producing equipment of the present invention is connected via piping to working in which electronic circuits, on fine performed, are formed, and produces an alkali type used abovementioned equipment. This comprises a preparation tank stock solution pure water supplied, these agitated, first liquid amount measuring means for inside tank, concentration developer, control adjusting basis measured value obtained by means, supply means.
lens.org 参考文章(13)
Toshiharu Ikuta, Norihiro Takasaki, Masafumi Nakamura, Method for diluting acid or alkaline stock solution and apparatus therefor ,(1998)
Takashi Sakaki, Kazushige Nishiyama, Method of manufacturing a developing agent bearing member ,(1997)
Mitsukazu Funahashi, Machio Chihara, Alkaline developable liquid photoimageable solder resist ink composition ,(1988)
Kevin T. O'Dougherty, Travis A. Lemke, Donald C. Grant, Chemical blending system with titrator control ,(1996)
Wei-Yang Su, Stephen Lee Sjoberg, Wheeler Conrad Crawford, Semiconductor developing agent ,(2001)
Shu Ogawa, Toshimoto Nakagawa, Shinichiro Shiotsu, Kouzo Tsukada, Apparatus for controlling developing solution ,(1992)
Kevin T. O'Dougherty, Alden W. Sandquist, Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid ,(1994)
O Patent Division Kamata, Yutaka C, O Patent Division Suguro, Yuki C, Developing liquid for photoresist ,(1984)
Naozumi Iwasawa, Tsuguo Yamaoka, Genji Imai, Processes for pattern formation using photosensitive compositions and liquid development ,(1995)
Satoshi Taguchi, Tsutomu Nagase, Norikazu Nakagawa, Masumi Suetsugu, Developer preparing apparatus and developer preparing method ,(1994)