Measurements of radioactive contaminants in semiconductor materials

作者: Michael S Gordon , Kenneth P Rodbell , Conal E Murray , Brendan D McNally

DOI: 10.1088/0268-1242/31/12/123003

关键词:

摘要: The emission of alpha particles from materials used to manufacture semiconductors can contribute substantially the single-event upset rate. originate contamination in materials, or radioactive isotopes, themselves. In this review paper, we discuss sources radioactivity and measurement methods detect emitted particles.

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