Correction device and correction method for optical measuring apparatus
作者： Ichiro Taniguchi , Ryoichi Imaizumi
DOI:
关键词:
摘要: A correction device for an optical measuring apparatus obtains data each scanning position of a light beam from that includes scanner which scans with region where measured object is placed, and receiver receives transmitted the region. The translucent scale having marks arranged at predetermined pitch, support to mount in so arrangement direction beam.
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