Two-dimensional electric motor

摘要: The invention includes a two-dimensional electric motor having two arrays of permanent magnets and at least coils. each have north south poles distributed in both longitudinal latitudinal directions along plane. North the first array are aligned with second array, array. coil has portion between magnets. In another embodiment, an sets coils positioned on different sides permits simpler control methods, more stable motion, increased efficiency, reduced stray magnetic fields. should be particularly useful semiconductor processing equipment.