High-density plasma source using excited atoms
作者： Roman Chistyakov
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摘要: The plasma source includes a cathode assembly. An anode is positioned adjacent to the excited atom generates an initial and atoms from volume of feed gas. are located proximate A power supply electric field between assembly anode. super-ionizes so as generate high-density plasma.
google.de 参考文章(47)
Kon J. Lee, Anthony Musset, Pre-ionization aided sputter gun ,(1985)
Thomas W Schmidt, Jack P Guillory, Charles F Cook, Mass spectrometer method and apparatus employing high energy metastable ions to generate sample ions ,(1969)
Ch. Steinbr�chel, A simple formula for low-energy sputtering yields Applied Physics A. ,vol. 36, pp. 37- 42 ,(1985) , 10.1007/BF00616458
Wayde H. Affleck, Robert E. Eldridge, David B. Cohn, Preionization electrode for pulsed gas laser ,(1989)
Shinichi Mizuguchi, Yoshikazu Yoshida, Excitation atomic beam source ,(1994)
Elmar Muller-Horsche, Bernd Keller, Ludwig Kohler, Apparatus for preionization of gas in a pulsed gas laser ,(1992)
Andre Anders, Constricted glow discharge plasma source ,(1999)
Michel J. Bertrand, Denis Faubert, Olivier Peraldi, Andre L'heureux, Metastable atom bombardment source ,(1999)
Ka-Ngo Leung, Yung-Hee Yvette Lee, Low energy spread ion source with a coaxial magnetic filter ,(1998)
James Ephraim Lovelock, Method for purifying a continuous flow of helium and/or neon gas ,(1987)