Integrated inductor having magnetic layer
作者： Donald S. Gardner , Ankur Mohan Crawford
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摘要: A dielectric layer is formed over a substrate comprising semiconductor material. magnetic the layer. The comprises an amorphous alloy cobalt.
lens.org 参考文章(73)
Masashi Sahashi, Atsuhito Sawabe, Michio Hasegawa, Hiroshi Tomita, Tetsuhiko Mizoguchi, Toshiro Sato, Miniature planar magnetic element e.g. induction coil or transformer - is formed by layers of insulating and magnetic material on either side of coil ,(1991)
Linggian Qian, Wen-Chin Stanley Yeh, Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor ,(1998)
Alfred M Laing, Process of magnetic particle preparation ,(1968)
M. Yamaguchi, K. Suezawa, M. Baba, Y. Takahashi, K. I. Arai, S. Kikuchi, Y. Shimada, S. Tanabe, K. Ito, Magnetic Thin-Film Inductor for rf Integrated Circuits Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials. ,vol. 1999, pp. 580- 581 ,(1999) , 10.7567/SSDM.1999.E-14-3
Bernard Miltenberger, Jean M. Sajer, Composite magnetic material and its production process ,(1988)
Tzuen-Hsi Huang, Chwan-Ying Lee, Electroless copper plating method for forming integrated circuit structures ,(1997)
Daniel Charles Edelstein, Christopher Vincent Jahnes, Cyprian Emeka Uzoh, Joachim Norbert Burghartz, Integrated circuit spiral inductor ,(1997)
Tsuneo Watanabe, Toshio Komori, Yoshiyuki Sugahara, Naoki Ito, Thin film transformer ,(1993)
Masashi Sahashi, Atsuhito Sawabe, Michio Hasegawa, Hiroshi Tomita, Tetsuhiko Mizoguchi, Toshiro Sato, Planar magnetic element ,(1996)
Lynn F. Schneemeyer, Ashraf W. Lotfi, Michael L. Steigerwald, R. Bruce Van Dover, Dean P. Kossives, Micromagnetic device having an anisotropic ferromagnetic core and method of manufacture therefor ,(1999)