Enhancement of light extraction efficiency of ultraviolet light emitting diodes by patterning of SiO2 nanosphere arrays

作者: B.J. Kim , H. Jung , J. Shin , M.A. Mastro , C.R. Eddy

DOI: 10.1016/J.TSF.2008.11.067

关键词:

摘要: Abstract Here we introduce a simple and robust method to improve the light extraction efficiency of ultraviolet emitting diodes (UV LEDs). Although many previous efforts have focused on etching GaN surfaces, employed solution process texture surface. Arrays SiO2 nanosphere monolayers were spun cast onto polymer layer, consisting benzocyclobutene (BCB) resins; subsequently, bottom half nanospheres sunk into BCB layer. The resulting array formed in hexagonal-like pattern ‘nano-lenses’ photoluminescence measurement exhibited that these patterns enhanced extracting UV LEDs by 23%.

参考文章(14)
Mohamed Henini, M. Razeghi, Optoelectronic Devices: III Nitrides ,(2004)
Mitsuo Fukuda, Optical semiconductor devices ,(1999)
Dong-Ho Kim, Chi-O Cho, Yeong-Geun Roh, Heonsu Jeon, Yoon Soo Park, Jaehee Cho, Jin Seo Im, Cheolsoo Sone, Yongjo Park, Won Jun Choi, Q-Han Park, None, Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns Applied Physics Letters. ,vol. 87, pp. 203508- ,(2005) , 10.1063/1.2132073
S. Meng, M. Qi, A. Li, X. Wang, G. Yu, B. Lei, X. Wang, C. Lin, Y. Sui, Recovery of Dry Etching–Induced Damage in n-GaN by Nitrogen Plasma Treatment at Growth Temperature Journal of Electronic Materials. ,vol. 36, pp. 697- 701 ,(2007) , 10.1007/S11664-007-0095-7
In-Hwan Lee, In-Hoon Choi, C. R. Lee, S. K. Noh, Evolution of stress relaxation and yellow luminescence in GaN/sapphire by Si incorporation Applied Physics Letters. ,vol. 71, pp. 1359- 1361 ,(1997) , 10.1063/1.119893
T. Fujii, Y. Gao, R. Sharma, E. L. Hu, S. P. DenBaars, S. Nakamura, Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening Applied Physics Letters. ,vol. 84, pp. 855- 857 ,(2004) , 10.1063/1.1645992
Toshio Nishida, Hisao Saito, Naoki Kobayashi, Efficient and high-power AlGaN-based ultraviolet light-emitting diode grown on bulk GaN Applied Physics Letters. ,vol. 79, pp. 711- 712 ,(2001) , 10.1063/1.1390485
Michael A. Mastro, Mijin Kim, Charles R. Eddy, Josh Caldwell, Jihyun Kim, Chul Soo Kim, Igor Vurgaftman, Ron T. Holm, Jerry R. Meyer, Zinc Sulphide Overlayer Two-Dimensional Photonic Crystal for Enhanced Extraction of Light from a Micro Cavity Light-Emitting Diode Japanese Journal of Applied Physics. ,vol. 47, pp. 7827- 7830 ,(2008) , 10.1143/JJAP.47.7827
Werner Stöber, Arthur Fink, Ernst Bohn, Controlled growth of monodisperse silica spheres in the micron size range Journal of Colloid and Interface Science. ,vol. 26, pp. 62- 69 ,(1968) , 10.1016/0021-9797(68)90272-5