Laser-assisted Mechanical Micromachining

摘要: Mechanical micro-cutting methods such as micro-grooving, micro-turning, and micro-milling are emerging viable alternatives to lithography based micromachining for applications in optics, semiconductors micro moulding. However, certain factors limit the range of workpiece materials that can be processed using these methods. For difficult-to-machine mould die steels sintered ceramics, limited cutting tool machine stiffness and/or strength pose significant barriers efficient use mechanical In addition, when at microscale, effect tool/machine deflection on dimensional accuracy machined feature pronounced. This chapter describes a novel hybrid process called Laser-Assisted Micromachining, or LAMM, is designed overcome aforementioned limitations The basic idea behind LAMM development LAMM-based prototype system experimental characterisation modelling laser assisted microgrooving process, concludes with discussion future directions this technology.