Substrates for high-Tc superconductor microwave integrated circuits
作者： E K Hollmann , O G Vendik , A G Zaitsev , B T Melekh
DOI: 10.1088/0953-2048/7/9/001
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摘要: This review paper presents a discussion on dielectric substrate materials suitable for the preparation of YBa2Cu3O7-x thin-film based microwave integrated circuits. The requirements properties are specified. They cover crucial both high-quality films and design elements. former includes mainly lattice match, match thermal expansivities, chemical stability, absence twinning. latter relative permittivity ( epsilon ) related tolerances, loss tangent, area required accommodation circuit. currently available substrates YBCO film epitaxy discussed in view these requirements. main attention is paid to properties. Current achievements potential difficulties crystal growth technology taken into account as well.
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