Modeling of Surface Forces between Micron-Sized Objects in Dry Condition

摘要: Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface can significantly affect the behavior performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that contact each other. Here, we are concerned with vdW force, is dominant force between conducting in dry condition. In this study, first review existing roughness models described by stochastic processes Gaussian Fractal type. Then, formulated using two methods considering second order probability density function (pdf) height distribution rough surfaces. The resulting formulae functions correlation ( n) successive sampling points. By analyzing these based on other parameters, upper lower bound identified a numericalbased closed-form formula for derived. Finally, various situations discussed developed equations data from micro machining process.