Micro-actuator damping and humidity protection
作者： Zine Eddine Boutaghou , Peter R. Segar
DOI:
关键词:
摘要: A micro-actuator including a skeleton having flexible beams, rotor portion, stator and damping material. The beams connect the portion to material is applied skeleton. provides protective layer of micro-actuator. increases characteristics micro actuator limits penetration humidity into actuator.
lens.org 参考文章(13)
Tomoyoshi Yamada, Yasumasa Kuroba, Keiji Aruga, Head actuator having reduced and controlled vibration characteristics for high speed disk drive systems ,(1996)
William C. Tang, Roger T. Howe, Laterally driven resonant microstructures ,(1989)
A. Peter Jardine, Active and adaptive damping devices for shock and noise suppression ,(1995)
Robert G. Walmsley, Jobst Brandt, Victor W. Hesterman, Magnetic micro-mover ,(1996)
Takahiro Imamura, Yoshifumi Mizoshita, Mechanism for minute movement of a head ,(1995)
Shigeru Takekado, Yasuo Ohtsubo, Recording/reproducing apparatus with coarse and fine head positioning actuators and an elastic head gimbal ,(1995)
Toshiki Hirano, Long-Sheng Fan, Shielded electrostatic microactuators for magnetic-head positioning such devices ,(1997)
Bodo Schultz, High density recording playback element construction ,(1974)
Jean-Georges Michel, Integral resonant support arms for piezoelectric microresonators ,(1977)
Robert E. Stewart, Monolithic vibrating beam angular velocity sensor ,(1997)