Low pressure argon plasma created by a microwave surface wave

摘要: Low pressure (0.01-10Torr) argon discharges created by surface waves, at 2-45 GHz and 100-500 W, are characterized. The radial axial profiles of the electron temperature density determined single double probes. An increase in is related to absorption wave power higher ionization efficiency high pressures. developed theories used explain distribution density. probe measurements confirm presence maxwellian energy distributions ranges gas power. discharge parameters, e.g. total needed maintain discharge, mean required for maintaining electron, θ, average electric field effective ⟨E eff⟩ computed as a function (P). Similarity laws θ/P E eff/N n product plasma radius.