作者: Johannes Kepler , L. Reindl , T. Ostertag , G. Scholl , R. Weigel
DOI:
关键词:
摘要: Abstract – Surface acoustic wave (SAW) devices can be used as novel identification and sensor elements (transponders) that donot need any power supply may requested wirelessly. Such a transponder picks up an electromagnetic request signaland stores it until all echoes caused by multi-path propagation have died away. Then, characteristic response signal is re-turned to the interrogator unit. Identification marks respond with their nonchanging pattern. In radio-linksensors, physical or chemical quantity influences properties of SAW consequently changes re-sponse pattern device. This paper surveys operating principle such sensors state-of-the-art perform-ance. The discussion illustrated several examples temperature for mechatronic applications. I. INTRODUCTION“Surface waves“ (SAWs) are sound waves propagating along surface elastic solid, associ-ated particle displacement in vicinity only. generated, detected influenced fromthe polished piezoelectric substrate chip means interdigital transducer (IDT), i. e., photolithographi-cally patterned planar metal electrodes shaped like two interleaved combs [1] (see fig. 1). electrical acousticalproperties element described well known P-matrix formalism: left rightacoustical ports characterized 1 2, respectively, connection port 3.