Process for fabricating iii-nitride based nanopyramid leds directly on a metalized silicon substrate

作者: Timothy David Sands , Isaac Harshman Wildeson

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摘要: A nanopyramid LED and method for forming. The includes a silicon substrate, III-nitride layer deposited thereon, metal thereon; grown in ohmic contact with the layer. can be seeded on or reflecting surface LED. forming LEDs obtaining depositing dielectric growth etching template layer, growing through performed by focused ion beam etching. stop so that seed off respectively.

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