Growth and characterization of C-N thin films

摘要: Abstract Our preliminary studies showed that carbon nitride in amorphous and crystalline forms can be synthesized using reactive magnetron sputtering with substrates held at ambient temperatures. The films were evaluated by a wide range of diagnostic techniques (Auger spectroscopy, IR scanning electron microscopy, energy-dispersive X-ray analysis, atomic force transmission microscopy tribo-testing). most important finding is we deposit smooth, continuous C-N on variety substrates. Unlike previous work, able to incorporate significant amounts nitrogen into these (N:C ratio exceeding 0.4 the bulk). More importantly, show exists not merely as gaseous species but chemically bonded film. Transmission clearly coexistence phases. When deposited polycrystalline zirconium substrates, appear very adherent wear resistant under lubricated sliding conditions. In dry against 52100 steels, gives friction coefficients low 0.16, comparable diamond.