Vapor deposition of ceramic materials

作者: David J. Wortman , William P. Minnear , David V. Rigney , Rudolfo Viguie , Richard A. Nardi

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摘要: Evaporated ceramic coatings are prepared by furnishing an ingot of a material, treating the to reduce sources gas within ingot, and evaporating material in melting surface with intense heat source. The evaporated is deposited upon substrate as coating. reduced content decreases incidence spitting eruptions from molten thereby improving quality coating, facilitating increases evaporation rates process production rates.

参考文章(4)
Pierre Jalby, Jean-Marie Friedt, Pierre Claverie, Juichi Arai, Frederic Rotman, Masao Kimura, Method of forming high purity metal silicides targets for sputtering ,(1991)
Kenji Hasegawa, Noriyoshi Hirao, Toru Sugihara, Yoshitaka Chiba, Sputtering target and process for preparing the same ,(1988)