Metal alloy elements in micromachined devices

摘要: A microelectromechanical device, comprizing: at least one flexible member formed from an alloy comprising: or more noble metals selected the group consisting of gold, platinum and palladium; alloying elements, elements iridium, ruthenium, rhodium, palladium, tungsten, osmium nickel, wherein form a solid solution with are present in amount sufficient to provide performance characteristic 50% greater than metal alone, said yield srength, tensile strength hardness.