Miniature lamellar grating interferometer based on silicon technology
作者： Omar Manzardo , Roland Michaely , Felix Schädelin , Wilfried Noell , Thomas Overstolz
DOI: 10.1364/OL.29.001437
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摘要: … grating interferometer realized with microelectromechanical system technology. It is used as a time-… The period of the modulation depends on wavelength l. As a consequence, the basic …
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