High throughput optimization of hard and tough TiN/Ni nanocomposite coatings by reactive magnetron sputter deposition

作者: Efstathios I. Meletis , Raquel González-Arrabal , Ignacio Lopez-Cabanas , Ignacio Lopez-Cabanas , Javier LLorca

DOI: 10.1016/J.SURFCOAT.2021.127226

关键词:

摘要: … in selected locations along the compositional gradient of the coating. Grids of 4 micropillars were prepared in 12 different locations along the direction of the compositional gradient, with …

参考文章(44)
J. Halling, The tribology of surface films Thin Solid Films. ,vol. 108, pp. 103- 115 ,(1983) , 10.1016/0040-6090(83)90496-0
G. Abadias, Stress and preferred orientation in nitride-based PVD coatings Surface & Coatings Technology. ,vol. 202, pp. 2223- 2235 ,(2008) , 10.1016/J.SURFCOAT.2007.08.029
M.S. Martin-Gonzalez, J. Olivares, A. Rivera, F. Briones, F. Agulló-López, D.O. Boerma, N. Gordillo, R. Gonzalez-Arrabal, DC triode sputtering deposition and characterization of N-rich copper nitride thin films: Role of chemical composition Journal of Crystal Growth. ,vol. 310, pp. 4362- 4367 ,(2008) , 10.1016/J.JCRYSGRO.2008.07.051
T. Kusunoki, F. Kakimoto, Y. Hirotsu, S. Nagakura, Lattice parameter of the non-stoichiometric compound TiNx Journal of Applied Crystallography. ,vol. 8, pp. 65- 66 ,(1975) , 10.1107/S0021889875009545
Xing-zhao Ding, X.T. Zeng, Y.C. Liu, Structure and properties of CrAlSiN Nanocomposite coatings deposited by lateral rotating cathod arc Thin Solid Films. ,vol. 519, pp. 1894- 1900 ,(2011) , 10.1016/J.TSF.2010.10.022
I. Petrov, P. B. Barna, L. Hultman, J. E. Greene, Microstructural evolution during film growth Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 21, pp. S117- S128 ,(2003) , 10.1116/1.1601610
John A. Thornton, Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings Journal of Vacuum Science and Technology. ,vol. 12, pp. 830- 835 ,(1975) , 10.1116/1.568682
F.T. Barwell, Wear of metals Wear. ,vol. 1, pp. 317- 332 ,(1958) , 10.1016/0043-1648(58)90004-8
J Musil, P Karvánková, J Kasl, Hard and superhard Zr–Ni–N nanocomposite films Surface & Coatings Technology. ,vol. 139, pp. 101- 109 ,(2001) , 10.1016/S0257-8972(01)00989-6
P.L. Tam, Z.F. Zhou, P.W. Shum, K.Y. Li, Structural, mechanical, and tribological studies of Cr–Ti–Al–N coating with different chemical compositions Thin Solid Films. ,vol. 516, pp. 5725- 5731 ,(2008) , 10.1016/J.TSF.2007.07.127