Piezoelectric motors including a stiffener layer

摘要: Various embodiments concern a gimbaled flexure having dual stage actuation structure. The comprises gimbal on which motor is mounted. first terminal, one or more layers of piezoelectric material, and metal stiffener disposed directly the terminal. layer defining majority top side motor. terminal can be gold sputtered material while nickel plated gold. cause motor, it mounted, to curl upon electrical activation