Micropump and sample-injector for integrated chemical analyzing systems
作者： Shuichi Shoji , Shigeru Nakagawa , Masayoshi Esashi
DOI: 10.1016/0924-4247(90)85036-4
关键词:
摘要: Abstract A dual pump and a buffer have been integrated on silicon wafer for chemical analyzing systems. These pumps realize constant rippleless liquid flow of small volume. The controllable rate the was up to about 40 μl/min maximum pumping pressure 1 mH2O. sample injector made two three-way valves has also fabricated with micromachining.
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sci-hub.se 参考文章(4)
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