High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates
作者： X. L. He , D. J. Li , J. Zhou , W. B. Wang , W. P. Xuan
DOI: 10.1039/C3TC31126K
关键词:
摘要: … devices using ZnO thin films deposited on polyimide substrates, and demonstrated that flexible SAW devices could be used as temperature sensors with high sensitivity, and they can …
rsc.org
sci-hub.se 参考文章(32)
R.V. Wright, G. Hakemi, P.B. Kirby, Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates Microelectronic Engineering. ,vol. 88, pp. 1006- 1009 ,(2011) , 10.1016/J.MEE.2011.01.038
Wei-Chih Lai, Jiun-Ting Chen, Ya-Yu Yang, ZnO-SiO2 solar-blind photodetectors on flexible polyethersulfone substrate with organosilicon buffer layer Applied Physics Letters. ,vol. 102, pp. 191115- ,(2013) , 10.1063/1.4807124
M. Penza, V.I. Anisimkin, Surface acoustic wave humidity sensor using polyvinyl-alcohol film Sensors and Actuators A-physical. ,vol. 76, pp. 162- 166 ,(1999) , 10.1016/S0924-4247(99)00004-7
XY Du, Yong Qing Fu, SC Tan, JK Luo, AJ Flewitt, WI Milne, Dae-Sik Lee, Nae-Man Park, J Park, YJ Choi, Sang Hyeob Kim, Sunglyul Maeng, ZnO film thickness effect on surface acoustic wave modes and acoustic streaming Applied Physics Letters. ,vol. 93, pp. 094105- ,(2008) , 10.1063/1.2970960
Jian Zhou, Xingli He, Hao Jin, Wenbo Wang, Bin Feng, Shurong Dong, Demiao Wang, Guangyi Zou, JK Luo, None, Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices Journal of Applied Physics. ,vol. 114, pp. 044502- ,(2013) , 10.1063/1.4816002
Pi-Guey Su, Chao-Shen Wang, Novel flexible resistive-type humidity sensor Sensors and Actuators B-chemical. ,vol. 123, pp. 1071- 1076 ,(2007) , 10.1016/J.SNB.2006.11.015
M. Suchea, S. Christoulakis, K. Moschovis, N. Katsarakis, G. Kiriakidis, ZnO transparent thin films for gas sensor applications Thin Solid Films. ,vol. 515, pp. 551- 554 ,(2006) , 10.1016/J.TSF.2005.12.295
Peeyush Bhargava, Kathy C. Chuang, Kenway Chen, Alan Zehnder, Moisture diffusion properties of HFPE‐II‐52 polyimide Journal of Applied Polymer Science. ,vol. 102, pp. 3471- 3479 ,(2006) , 10.1002/APP.24549
Jack K. Luo, Y.Q. Fu, Greg Ashley, Williams I. Milne, Integrated ZnO Film Based Acoustic Wave Microfluidics and Biosensors Advances in Science and Technology. ,vol. 67, pp. 49- 58 ,(2010) , 10.4028/WWW.SCIENTIFIC.NET/AST.67.49
Yong Qing Fu, Luis Garcia-Gancedo, Hua-Feng Pang, Samuele Porro, Yan-Wei Gu, JK Luo, Xiao-Tao Zu, Frank Placido, JIB Wilson, AJ Flewitt, WI Milne, Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices Biomicrofluidics. ,vol. 6, pp. 024105- ,(2012) , 10.1063/1.3699974