Study on Non-destructive Measurement Method of Contact Sheet Resistance for Graphene Film

作者: Yongqiang Yang , Hailong Ding , Xiaobao Cheng , Qinsheng Wang , Bingxian Ou

DOI: 10.1109/ICEDME50972.2020.00013

关键词:

摘要: Graphene film materials have a wide range of applications. The accurate and non-destructive measurement the sheet resistance plays an important role in graphene application. probe traditional four-probe measuring instruments is made hard metal materials, which probably result mechanical damage processing. Besides, accuracy reproducibility are also poor. In this paper, conductive rubber was used as due to their flexibility conductivity. other can be effectively avoided, repeatability data obtained. This provides alternative technique measure fragile thin materials.

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