Vertical heat-treating apparatus
作者： Hironobu Nishi
DOI:
关键词:
摘要: A vertical heat-treating apparatus which is effective for preventing dust or fine particles from being attached to a wafer during the loading/unloading transport of thereby manufacture high-quality wafers. This comprises carrier stocker storing plurality carriers, mechanism transferring wafers between carriers and vessel, furnaces wafers, transporting vessel furnace, gas supply means forming clear stream passing exclusively through and/or mechanism.
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