Microstructure and Mechanical Properties of ZrN, ZrCN and ZrC Coatings Grown by Chemical Vapor Deposition
作者： Michael Tkadletz , Christoph Czettl , Nina Schalk , Florian Frank
关键词:
摘要: As the demands for wear-resistant coatings in the cutting industry are constantly rising, new materials that have the potential to exhibit enhanced coating properties are continuously …
mdpi.com
sci-hub.st 参考文章(54)
J Kováčik, None, Correlation between Young's modulus and porosity in porous materials Journal of Materials Science Letters. ,vol. 18, pp. 1007- 1010 ,(1999) , 10.1023/A:1006669914946
C. Sabitzer, C. Steinkellner, C.M. Koller, P. Polcik, R. Rachbauer, P.H. Mayrhofer, Diffusion behavior of C, Cr, and Fe in arc evaporated TiN- and CrN-based coatings and their influence on thermal stability and hardness Surface & Coatings Technology. ,vol. 275, pp. 185- 192 ,(2015) , 10.1016/J.SURFCOAT.2015.05.020
Seung-Hoon Jhi, Jisoon Ihm, Steven G. Louie, Marvin L. Cohen, Electronic mechanism of hardness enhancement in transition-metal carbonitrides Nature. ,vol. 399, pp. 132- 134 ,(1999) , 10.1038/20148
V. Krasnenko, M.G. Brik, First-principles calculations of the structural, elastic and electronic properties of MNxC1−x (M = Ti, Zr, Hf; 0 ≤ x ≤ 1) carbonitrides at ambient and elevated hydrostatic pressure Solid State Sciences. ,vol. 28, pp. 1- 8 ,(2014) , 10.1016/J.SOLIDSTATESCIENCES.2013.11.012
W. Schintlmeister, W. Wallgram, J. Kanz, K. Gigl, Cutting tool materials coated by chemical vapour deposition Wear. ,vol. 100, pp. 153- 169 ,(1984) , 10.1016/0043-1648(84)90011-5
K.-T. Rie, A. Gebauer, J. Woehle, Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties Surface & Coatings Technology. ,vol. 60, pp. 385- 388 ,(1993) , 10.1016/0257-8972(93)90118-8
Kwang Ho Kim, Seong Ho Lee, Comparative studies of TiN and Ti1−xAlxN by plasma-assisted chemical vapor deposition using a TiCl4/AlCl3/N2/H2/Ar gas mixture Thin Solid Films. ,vol. 283, pp. 165- 170 ,(1996) , 10.1016/0040-6090(96)08766-4
R Hill, The Elastic Behaviour of a Crystalline Aggregate Proceedings of the Physical Society. Section A. ,vol. 65, pp. 349- 354 ,(1952) , 10.1088/0370-1298/65/5/307
V. I. Ivashchenko, P. E. A. Turchi, A. Gonis, L. A. Ivashchenko, P. L. Skrynskii, Electronic origin of elastic properties of titanium carbonitride alloys Metallurgical and Materials Transactions A-physical Metallurgy and Materials Science. ,vol. 37, pp. 3391- 3396 ,(2006) , 10.1007/S11661-006-1031-9
J. Wagner, C. Mitterer, M. Penoy, C. Michotte, W. Wallgram, M. Kathrein, The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings International Journal of Refractory Metals & Hard Materials. ,vol. 26, pp. 120- 126 ,(2008) , 10.1016/J.IJRMHM.2007.01.010