Ultrasonic transducer array having laser-drilled vias for electrical connection of electrodes
作者： J. E. Snyder
DOI: 10.1121/1.420415
关键词:
摘要: A system and process for electrically connecting all elements in a transducer array from one side. flat block of piezoelectric ceramic material is patterned drilled with high-powered laser. The drilling precisely controlled to define series vias which penetrate the thickness direction. These facilitate electrical connection side other when are sputtered or plated conductive material. In this way electrodes on front face can be connected rear common ground signal source.
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