Precision fluid head transport

摘要: A method of treating a substrate including providing fluid treatment apparatus first sheet material having plurality spaced apart drive rod receiving passages extending therethrough and through an upper surface thereof. An inside each passage provides bearing for rod. At least one is provided between the passages. inserted into passage. The rods at partially extend above sheet. second has lower below arranged over sheet, such that sheets face other. mechanism rotates rods. supply supplies to injector also includes source. be treated caused pass transportation heads. flow treat substrate.