Saw magnetic sensor and manufacturing method for same
作者： Li Yang , Zhou Zhuofan , Zhu Benpeng , Tong Bei , Ouyang Jun
DOI:
关键词:
摘要: A SAW (Surface Acoustic Wave) magnetic sensor includes: a piezoelectric thin film; seed layer; an interdigital transducer arranged respectively on each side of the film, comprising electrode made from materials, and reflector grids located at both ends electrode; underlying substrate layer opposite to film. manufacturing method for is also disclosed.
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