Rapid, noncontact optical figuring of aspheric surfaces with plasma-assisted chemical etching

摘要: This paper presents results on figuring aspheric optical surfaces by Plasma Assisted Chemical Etching (PACE) demonstrating rapid, predictable convergence to the final figure. The data shows better than 95% of figure in a single operation for large spatial errors (on order plasma tool size and larger) high efficiency correcting errors much smaller tool (mid-spatial frequency range). Automated correction arbitrary are made from surface metrology data. technology can be scaled from small optics, millimeters diameter, optics, meters in diameter. A PACE production capability is first being developed for relatively small up 12" that have an anamorphic shape. The central feature control material removal regardless surface shape. In addition, it capable high removal rates polishing process, one two orders of magnitude larger conventional pitch polishing. Thus, PACE can used generation as well figure correction. intrinsically smoothes while removing material leaving virgin free process related contamination and subsurface damage.